The Quartz Supper Domes are precision-manufactured components used in semiconductor and photovoltaic manufacturing processes requiring ultra-clean, smooth surfaces. Made from high-purity fused quartz, these plates undergo advanced polishing techniques to achieve superior surface flatness and optical clarity.

Their exceptional chemical inertness and thermal stability make them ideal for use in high-temperature environments, such as in diffusion, oxidation, and CVD reactors. The polished surface minimizes particle adhesion and contamination, supporting high yield and process consistency.

Quartz Supper Domes in Epitaxial Layer Growth Processes

Quartz supper domes are essential components in semiconductor epitaxial layer growth, providing a stable and high-purity environment for wafer processing. Their precision-crafted structure ensures uniform thermal distribution across the wafer surface, which is critical for achieving consistent epitaxial layer thickness and high-quality crystal growth.

Made from high-purity fused quartz, supper domes offer excellent resistance to high temperatures and chemical corrosion, minimizing contamination and ensuring long-term reliability in high-temperature epitaxial furnaces. By maintaining a controlled atmosphere and protecting wafers from direct thermal radiation, quartz supper domes enhance process uniformity, improve wafer yield, and reduce defects.

These components are widely used in semiconductor fabrication, research and development, and advanced epitaxial equipment. Custom designs are available to match specific furnace sizes and process requirements, making quartz supper domes a key element in modern wafer manufacturing.