Name:

6 inch Quartz Boat Series

Function & Application:

This series includes a variety of quartz boats, such as cage boats, baffle boats, base boats, and standard wafer boats, designed for supporting silicon wafers during high-temperature semiconductor processes like diffusion, oxidation, CVD deposition, and wafer cleaning. These different shapes and structures optimize gas flow, thermal uniformity, and wafer stability across a broad range of manufacturing and research applications.

Performance Requirements:

High purity fused quartz construction with excellent thermal stability, corrosion resistance, and low impurity content. Robust design to withstand repeated thermal cycling. Smooth, polished or sandblasted surfaces to minimize particle generation and contamination, ensuring compatibility with automated wafer handling systems and various furnace types.