Quartz Boat

product details

Renowned for its strength and reliability, the 6 inch quartz glass wafer boat features a robust frame and reinforced joints that resist thermal shock, warping, and mechanical stress during repeated furnace cycles. Its excellent chemical resistance ensures compatibility with aggressive cleaning agents and reactive process gases, making it ideal for diffusion, oxidation, LPCVD, and annealing applications.

Each unit is meticulously polished and fabricated to tight tolerances to reduce particle generation and prevent wafer slippage or damage. The smooth quartz glass surface ensures clean, contamination-free processing and long-term reliability in demanding cleanroom environments. Whether in high-volume manufacturing or precision R&D work, the boat offers consistent performance, extended service life, and the dependability required for critical wafer processing.

Contact us
  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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